{"id":1256,"date":"2021-02-26T16:48:25","date_gmt":"2021-02-26T21:48:25","guid":{"rendered":"https:\/\/demo.irdq.ca\/project\/des-donnees-fondamentales-pour-la-fabrication-des-resonateurs\/"},"modified":"2021-03-23T17:11:46","modified_gmt":"2021-03-23T21:11:46","slug":"basic-data-for-the-fabrication-of-resonators","status":"publish","type":"project","link":"https:\/\/demo.irdq.ca\/en\/project\/basic-data-for-the-fabrication-of-resonators\/","title":{"rendered":"BASIC DATA FOR THE FABRICATION OF RESONATORS"},"content":{"rendered":"<h3>+PRECISE +EFFICIENT +INTEGRATED<\/h3>\n<p>To fabricate a high-quality MEMS resonator, it is essential to know the damping properties of its components, notably those related to internal friction in thin films (50 to 500 nm thick). For the first time, professors Vengallatore and Fr\u00e9chette have succeeded in accurately measuring this data, thanks to a silicon microcantilever, which made it possible to work at the dissipation limit established by thermoelastic amortization.<\/p>\n<p>This strategy made it possible to showcase an important phenomenon in the field of MEMS resonators: gold films dissipate less energy than aluminium or silver films at frequencies between 100 Hz and 1.5 kHz. It also showed that internal friction phenomena are dominated by defects induced during the production of the films. This work will serve to guide fabrication methods in order to obtain high-quality resonators.<\/p>\n<h3>REFERENCE<\/h3>\n<p>[1] G. Sosale, S. Prabhakar, L.G. Frechette, S. Vengallatore, Journal of Microelectromechanical Systems, 20, 3, 764-773 (2011)<\/p>\n<h3>RESEARCHERS<\/h3>\n<p>G. Sosale, D. Almecija and Pr. S.Vengallatore (Universit\u00e9 McGill), Pr. L. Fr\u00e9chette (Universit\u00e9 de Sherbrooke)<\/p>\n<h3>IRDQ CONTRIBUTION<\/h3>\n<ul>\n<li><a href=\"https:\/\/demo.irdq.ca\/en\/tag-product\/ebeam-lithography\/\">ebeam lithography<\/a><\/li>\n<li><a href=\"https:\/\/demo.irdq.ca\/en\/tag-product\/inductively-coupled-plasma-reactive-ion-etching-icp-rie\/\">Inductively coupled plasma reactive ion etching (ICP-RIE)<\/a><\/li>\n<li><a href=\"https:\/\/demo.irdq.ca\/en\/tag-product\/mask-aligner\/\">Mask aligner<\/a><\/li>\n<li><a href=\"https:\/\/demo.irdq.ca\/en\/tag-product\/scanning-electron-microscopy-sem\/\">Scanning electron microscopy (SEM)<\/a><\/li>\n<li><a href=\"https:\/\/demo.irdq.ca\/en\/tag-product\/sputtering-deposition\/\">Sputtering deposition<\/a><\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"<p>+PRECISE +EFFICIENT +INTEGRATED To fabricate a high-quality MEMS resonator, it is essential to know the damping properties of its components, notably those related to internal friction in thin films (50 to 500 nm thick). For the first time, professors Vengallatore and Fr\u00e9chette have succeeded in accurately measuring this data, thanks to a silicon microcantilever, which [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":1257,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_et_pb_use_builder":"","_et_pb_old_content":"","_et_gb_content_width":""},"project_category":[657,654],"project_tag":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v23.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>BASIC DATA FOR THE FABRICATION OF RESONATORS | IRDQ<\/title>\n<meta name=\"robots\" content=\"noindex, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"BASIC DATA FOR THE FABRICATION OF RESONATORS | IRDQ\" \/>\n<meta property=\"og:description\" content=\"+PRECISE +EFFICIENT +INTEGRATED To fabricate a high-quality MEMS resonator, it is essential to know the damping properties of its components, notably those related to internal friction in thin films (50 to 500 nm thick). For the first time, professors Vengallatore and Fr\u00e9chette have succeeded in accurately measuring this data, thanks to a silicon microcantilever, which [&hellip;]\" \/>\n<meta property=\"og:url\" content=\"https:\/\/demo.irdq.ca\/project\/des-donnees-fondamentales-pour-la-fabrication-des-resonateurs\/\" \/>\n<meta property=\"og:site_name\" content=\"IRDQ\" \/>\n<meta property=\"article:modified_time\" content=\"2021-03-23T21:11:46+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/demo.irdq.ca\/wp-content\/uploads\/2021\/02\/mems1_ctq.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"170\" \/>\n\t<meta property=\"og:image:height\" content=\"150\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data1\" content=\"1 minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/demo.irdq.ca\/project\/des-donnees-fondamentales-pour-la-fabrication-des-resonateurs\/\",\"url\":\"https:\/\/demo.irdq.ca\/project\/des-donnees-fondamentales-pour-la-fabrication-des-resonateurs\/\",\"name\":\"BASIC DATA FOR THE FABRICATION OF RESONATORS | IRDQ\",\"isPartOf\":{\"@id\":\"https:\/\/demo.irdq.ca\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/demo.irdq.ca\/project\/des-donnees-fondamentales-pour-la-fabrication-des-resonateurs\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/demo.irdq.ca\/project\/des-donnees-fondamentales-pour-la-fabrication-des-resonateurs\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/demo.irdq.ca\/wp-content\/uploads\/2021\/02\/mems1_ctq.jpg\",\"datePublished\":\"2021-02-26T21:48:25+00:00\",\"dateModified\":\"2021-03-23T21:11:46+00:00\",\"breadcrumb\":{\"@id\":\"https:\/\/demo.irdq.ca\/project\/des-donnees-fondamentales-pour-la-fabrication-des-resonateurs\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/demo.irdq.ca\/project\/des-donnees-fondamentales-pour-la-fabrication-des-resonateurs\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/demo.irdq.ca\/project\/des-donnees-fondamentales-pour-la-fabrication-des-resonateurs\/#primaryimage\",\"url\":\"https:\/\/demo.irdq.ca\/wp-content\/uploads\/2021\/02\/mems1_ctq.jpg\",\"contentUrl\":\"https:\/\/demo.irdq.ca\/wp-content\/uploads\/2021\/02\/mems1_ctq.jpg\",\"width\":170,\"height\":150},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/demo.irdq.ca\/project\/des-donnees-fondamentales-pour-la-fabrication-des-resonateurs\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Accueil\",\"item\":\"https:\/\/demo.irdq.ca\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Projets\",\"item\":\"https:\/\/demo.irdq.ca\/project\/\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"BASIC DATA FOR THE FABRICATION OF RESONATORS\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/demo.irdq.ca\/#website\",\"url\":\"https:\/\/demo.irdq.ca\/\",\"name\":\"IRDQ\",\"description\":\"Infrastructure en recherche et d\u00e9veloppement du Qu\u00e9bec\",\"publisher\":{\"@id\":\"https:\/\/demo.irdq.ca\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/demo.irdq.ca\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"en-US\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/demo.irdq.ca\/#organization\",\"name\":\"IRDQ\",\"url\":\"https:\/\/demo.irdq.ca\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/demo.irdq.ca\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/demo.irdq.ca\/wp-content\/uploads\/2021\/02\/irdq-logo-vertical.png\",\"contentUrl\":\"https:\/\/demo.irdq.ca\/wp-content\/uploads\/2021\/02\/irdq-logo-vertical.png\",\"width\":1705,\"height\":683,\"caption\":\"IRDQ\"},\"image\":{\"@id\":\"https:\/\/demo.irdq.ca\/#\/schema\/logo\/image\/\"}}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"BASIC DATA FOR THE FABRICATION OF RESONATORS | IRDQ","robots":{"index":"noindex","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"og_locale":"en_US","og_type":"article","og_title":"BASIC DATA FOR THE FABRICATION OF RESONATORS | IRDQ","og_description":"+PRECISE +EFFICIENT +INTEGRATED To fabricate a high-quality MEMS resonator, it is essential to know the damping properties of its components, notably those related to internal friction in thin films (50 to 500 nm thick). 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