Spin Coater (CEE100)
Spin Coater (CEE100)
Additional information
| MANUFACTURER | Brewer |
|---|---|
| MODEL | CEE100 |
Samples
- Sample size : 150 mm maximum
- Dispensing: manual and automatic
Characteristics
- Completely automated operation via saved recipes
- Automated wafer back-side cleaning and edge bead removal
- Rotation speed: 0 to 6000 rpm ± 1 rpm
- Acceleration: up to 50 krpm/s
- Integrated heating plate: up to 250 °C ± 0.1 °C
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To use this equipment
The equipment available is accessible to the academic and industrial research community.
To learn about the terms of use and availability, please complete the form below. After reviewing your request, we will get in touch with you promptly to offer the best available solution.