Scanning Electron Microscope (sem) (Quanta 3D FEG)
Scanning Electron Microscope (sem) (Quanta 3D FEG)
Additional information
| MANUFACTURER | FEI Company |
|---|---|
| MODEL | Quanta 3D FEG |
Samples
- Equipped with a Field Effect Gun (FEG) allowing the observation of non-conducting samples
- Equipped with a Ga+ion gun: 2 to 30 kV, 1 pA to 65 nA with a resolution of 7 nm
Analysis
- Electron gun: 200 V to 30 kV, 200 nA maximum
- Resolution : 1,2 nm
Variants
- Energy Dispersive Spectrometer (EDS) for X-ray elemental analysis
Applications
- Nanometric-scale sample observation (SEM)
- X-ray elemental analysis (EDS)
- Nanometric-scale etch (FIB)
- Cross-section analysis of multilayer films (FIB-SEM)
To use this equipment
The equipment available is accessible to the academic and industrial research community.
To learn about the terms of use and availability, please complete the form below. After reviewing your request, we will get in touch with you promptly to offer the best available solution.