Ebeam evaporator

Additional information

MANUFACTURER Conception HiVac System
MODEL Home made

Unique in Quebec :

  • Offering the ability to perform evaporations on rotating samples
  • Sample sizes : 10 mm to 100 mm

Characteristics

  • Pressure : 0.001 mTorr to 0.0035 mTorr
  • Source Telemark, Model 211
  • Mini DC motor for samples rotation
  • Possibility to perform a joule effect evaporation before or after an e-beam evaporation

 

ROUTINE PROCESS

Evaporation

Metal deposition

  • Al and Pt
  • Thickness : 15 nm to 500 nm

To use this equipment

The equipment available is accessible to the academic and industrial research community.

To learn about the terms of use and availability, please complete the form below. After reviewing your request, we will get in touch with you promptly to offer the best available solution.