Auger Spectroscopy (NanoSAM)

Auger Spectroscopy (NanoSAM)

Additional information

MANUFACTURER Omicron Nanotechnology
MODEL NanoSAM

Equipment unique in the world equipped with an EBSD detector in UHV

  • Semi-quantitative elemental and (in some cases) chemical analysis
  • Sampled depth : 5 to 10 nm maximum
  • Mapping available
  • Depth profiling possible

Applications

  • Surface analysis of metals and semi-conductors
  • Analysis of insulating material possible but more problematic

Characteristics

  • Equipped with an EBSD (back-scattered diffraction) detector in UHV
  • Lateral resolution: 10 nm
  • Detected elements: Lithium to Uranium
  • Sensitivity: 0.1 at% to 1 at%
  • Depth resolution: 2 nm to 20 nm
  • Equipped with a preparation chamber, imaging during heating, sputtering by ion beam

To use this equipment

The equipment available is accessible to the academic and industrial research community.

To learn about the terms of use and availability, please complete the form below. After reviewing your request, we will get in touch with you promptly to offer the best available solution.