Ellipsometer (M-2000)
Ellipsometer (M-2000)
Additional information
| MANUFACTURER | J.A. Woollam |
|---|---|
| MODEL | M-2000 |
Samples
- Sample sizes: maximum 150 mm x 150 mm (6ˮ x 6ˮ)
- Thickness : maximum 1 cm
Analysis
- Quantitative measurement of the optical constants and thicknesses of thin films
- 3D mapping possible
- Spectral resolution: 0.05 nm
- Measurement in reflexion mode
Applications
- Quick photoresist thickness measurement
Characteristics
- Wavelengths: 370 to 1000 nm
- Sample holder: small die up to 150 mm wafers
- Accessories improving resolution up to 150 µm
To use this equipment
The equipment available is accessible to the academic and industrial research community.
To learn about the terms of use and availability, please complete the form below. After reviewing your request, we will get in touch with you promptly to offer the best available solution.